Manual Wet Bench by PCT Systems

Front Access Manual Wet Benches

PCT’s FAS Series manual front access stations are constructed of either 304 Stainless Steel or Polypropylene. Standard construction methods include: reinforced plenum, lip exhaust on all chemical baths, DI and N2 guns, and side shields. The wet process stations are designed for complete modularity giving the flexibility to change processes with minimal downtime and expense. Typical chemistries include: SC1 and SC2, Sulfuric Peroxide (SPM), dilute HF, and Nitride Etch. The manual stations can be configured to include multiple temperature controlled tanks, quick dump rinsers, and Megasonic/Ultrasonic tanks.

FAS Series Product Features

Material

Polypropylene
FM4910 Compliant Materials
304 Stainless Steel

Process Tanks

Heated Quartz
Heated SST
Megasonic
Ultrasonic

Safety

SEMI S2 EPO Circuitry
N2/CDA Interlocks

Manual Wet Bench Specifications

Controllers/User Interface
Microprocessor based PID Temperature controller, Timers,
Quick Dump Rinser Controls
EPO Controller with master relay, On/Off Switches and LED indicators
PLC Controllers with Touch Screen Optional
System Options
Tank Level Monitoring
Chemical/DI Auto Replenish
Onboard Waste Containers
CE Certification
Semi-auto front to back arm
CO2 Fire Suppression
Standard Bench Sizes: 36” x 42” x 75”
48” x 42” x 75”
72” x 42” x 75"
Tank Material Options Polypro, FRPP, PVCC, SST
DI Manifold NPP or PVDF
Tanks and Configurations
Quartz Tanks Static or Recirculating
Stainless Steel Tanks Heated and Recirculating
Ultrasonic Tanks Static or Recirculating
Megasonic Tanks Static or Recirculating
HF/BOE Tanks Recirculating

Certifications

ETL & CSA certification

ETL File No. 567511 per UL 3101-1 and CSA 1010.1

CE 61010-1 approval

CE EN 61010-1 European Safety Approval

CE 55011 EMI approval

CE EN 55011 European EMI Approval

CE 50082-2 ESD approval

CE EN 50082-2 European ESD, RF, and Transient Susceptibility Approval