Megasonic HyperClean™ Generators

Megasonic performance starts with the generator and not all generators are created equal. Simply put, PCT offers the most versatile and fully featured megasonic generators on the market. PCT has pioneered and developed the leading megasonic technology available in the global market with numerous patents and pending applications. Customers around the world have come to depend on PCT for the highest quality and performance megasonic systems today. With the development of super fine geometries with more fragile structures and substrates, customers need more process development options than ever before to be successful, productive and profitable. HyperClean™ incorporates PCT’s unique energy-transfer technology for superior submicron cleaning, reduced operating costs and high reliability.

6000 Series Standard Generator

  • Multiplexing operation for 2-8 transducers per output.
  • Optional embedded temperature controller for heaters
  • Individually Configurable and Tunable for Optimum Process Results
  • Programmable RF Output Range up to 350 Watts per Channel
  • 2 Independent Channels with 8 outputs per Channel
  • Synchronized or Individual Control of Each Channel
  • Patented Multiplexing for On/Off Control of Individual Transducersv
  • Process Variables and Real Time Data Monitoring
  • Multiple Frequency Bands Individually Controlled
  • (600 kHz – 1 MHz)

9200 Series Mini-Meg Generator

  • Independent Power & Frequency Control for each RF Output
  • 2 Independent Channels with 2 outputs per Channel
  • Programmable RF Output Range up to 500 Watts per Channel
  • Programmable Up to 8 Step Changes per Channel
  • Active Phase Shifting for Three-Dimensional Control of Megasonic Energy
  • Individually Configurable and Tunable for Optimum Process Results
  • Synchronized or Individual Control of Each Channel
  • Multiple Frequency Bands Individually Controlled
  • Patented Multiplexing for On/Off Control of Individual Transducers
  • Process Variables and Real Time Data Monitoring
  • Available with choice of one frequency:
    • 450 kHz
    • 750 kHz
    • 950 kHz

9400 Series Universal Generator

  • Independent Power & Frequency Control for each RF Output
  • Active Phase Shifting for Three-Dimensional Control of Megasonic Energy
  • Individually Configurable and Tunable for Optimum Process Results
  • Programmable Up to 8 Step Changes per Channel
  • Programmable RF Output Range up to 500 Watts per Channel
  • 4 Independent Channels with 2 outputs per Channel
  • Synchronized or Individual Control of Each Channel
  • Multiple Frequency Bands Individually Controlled
  • Patented Multiplexing for On/Off Control for pairs of transducers
  • Process Variables and Real Time Data Monitoring
  • Universal Application for Most Competitive Transducers — Matching Required
  • Over 90%+ Efficiency from the Smallest Size Generator of all Competitive Units
  • Available with three frequency band options:
    • 500 kHz – 1 MHz
    • 1.0 – 1.5 MHz
    • 2.0 – 2.5 MHz
Power ANY Brand Tank / Transducer with a PCT Megasonic Generator and see Improved Performance!

Read about our head-to-head test which demonstrates the performance advantages of a PCT generator (higher acoustic energy levels, and a tighter, more uniform energy distribution) in our newsletter article, PCT Generators Outperform the Competition