- Megasonic Technology
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PCT’s Megasonic cleaning is the most advanced solution for achieving HyperClean™ semiconductor wafers available today. It has become the new standard for constant-temperature baths.
PCT designed the Megasonic system with a combination of moving-beam and phase-shifting technology to make it the most efficient cleaning system — more than 90% acoustical-energy efficient.
A compact, all-quartz vessel ensures superior cleanliness and high purity. The unit is stress free and operates comfortably at elevated temperatures while using fewer chemicals and saving valuable clean room space.
HyperClean™ incorporates PCT’s unique energy-transfer technology in a heated all-quartz unit for superior submicron cleaning, reduced operating costs and high reliability.
No moving parts for improved cleanliness
Improved energy uniformity—no dead spots
More than 90% acoustical-energy efficiency
Uniform particle removal
High-energy density with low-power output for extended transducer life
High-purity heated quartz vessel for the highest-purity processing
Easy to retrofit to existing wet stations
Available for wafers up to 450 mm and beyond
Optional filtered/recirculation version
Acid / solvent / stripper-compatible materials available
Available in manual and automatic stand-alone systems
Frequency range 450 KHz – 1 MHz
ETL File No. 567511 per UL 3101-1 and CSA 1010.1
CE EN 61010-1 European Safety Approval
CE EN 55011 European EMI Approval
CE EN 50082-2 European ESD, RF, and Transient Susceptibility Approval
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