Hyperclean by PCT Systems

HyperCleantm Megasonic Systems

PCT’s Megasonic cleaning is the most advanced solution for achieving HyperClean™ semiconductor wafers available today. It has become the new standard for constant-temperature baths.

In every industry there’s a leader.

PCT designed the Megasonic system with a combination of moving-beam and phase-shifting technology to make it the most efficient cleaning system — more than 90% acoustical-energy efficient.

A compact, all-quartz vessel ensures superior cleanliness and high purity. The unit is stress free and operates comfortably at elevated temperatures while using fewer chemicals and saving valuable clean room space.

HyperClean™ incorporates PCT’s unique energy-transfer technology in a heated all-quartz unit for superior submicron cleaning, reduced operating costs and high reliability.

Features

No moving parts for improved cleanliness
Improved energy uniformity—no dead spots
More than 90% acoustical-energy efficiency
Uniform particle removal

High-energy density with low-power output for extended transducer life
High-purity heated quartz vessel for the highest-purity processing
Easy to retrofit to existing wet stations
Available for wafers up to 450 mm and beyond

Optional filtered/recirculation version
Acid / solvent / stripper-compatible materials available
Available in manual and automatic stand-alone systems
Frequency range 450 KHz – 1 MHz

Certifications

ETL & CSA certification

ETL File No. 567511 per UL 3101-1 and CSA 1010.1

CE 61010-1 approval

CE EN 61010-1 European Safety Approval

CE 55011 EMI approval

CE EN 55011 European EMI Approval

CE 50082-2 ESD approval

CE EN 50082-2 European ESD, RF, and Transient Susceptibility Approval