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Hyperclean Megasonics Wafer Cleaning System
Overview
MEGASONICS — HyperClean ™ Wafer Cleaning System
In every industry there’s a leader. PCT’s Megasonics cleaning is the most advanced solution to achieving HyperClean ™ semiconductor wafers available today. It has become the new standard for constant-temperature baths. PCT designed the Megasonics system with a combination of moving-beam and phase-shifting technology to make it the most efficient cleaning system — more than 90% acoustical-energy efficient.
A compact, all-quartz vessel ensures superior cleanliness and high purity. The unit is stress free and operates comfortably at elevated temperatures while using fewer chemicals and saving valuable cleanroom space.
HyperClean ™ incorporates PCT’s unique energy-transfer technology in a heated all-quartz unit for superior submicron cleaning, reduced operating costs and high reliability.
Features
- No moving parts for improved cleanliness
- Improved energy uniformity no dead spots
- More than 90% acoustical-energy efficiency
- Uniform particle removal
- High-energy density with low-power output for extended transducer life
- High-purity heated quartz vessel for the highest-purity processing
- Easy to retrofit to existing wet stations
- Available for wafers up to 300 mm and beyond
- Optional filtered/recirculation version
- Acid-, solvent- and stripper-compatible materials available
- Available in manual and automatic stand-alone systems.
- Frequency range 450 KHz - 1 MHz
PCT Certifications
- ETL File No. 567511 per UL 3101-1 and CSA 1010.1
- CE EN 61010-1 European Safety Approval
- CE EN 55011 European EMI Approval
- CE EN 50082-2 European ESD, RF, and Transient Susceptibility Approval
Megasonics Quick Dumprinser
Overview
Megasonics Quick Dumprinser
PCT’s Megasonics Quick Dumprinser construction exceeds the most stringent demands of today’s wafer fabrication facilities.
The Megasonics Quick Dumprinser from PCT is available in a variety of vessel materials, and has four-side overflow. It is designed for low water volume, while providing the ultimate in megasonics cleaning.
Features
- Removable energy window (plastic units only)
- Frequency range of 450 Khz - 1 Mhz at resonant levels
- Vessel material of poly, quartz, PVDF, or stainless steel, PFA
- Megasonics-assisted rinsing using multiplexed transducers
- Four-sided overflow
- Low water volume
- Integrated control system
Submersible Arrays
Overview
Submersible Megasonics Array
PCT brings megasonics cleanliness to your cleaning bath.
PCT’s new Submersible Megasonics Array offers you the advantage of ultra-clean substrates with the advanced features of any megasonics unit available today.
The Submersible Megasonics Array turns your cleaning bath into a megasonics unit simply by placing the unit into the bath. You get state-of-the-art power and control with PCT’s computer-controlled solid-state amplifier as the megasonics energy source.
You can set up the array for remote operation with an audible or visual alarm up to twelve feet from the bath.
You can go megasonics quickly.
Features
- Transferable energy window (completely mobile)
- Frequency range 600 kHz to 800 kHz at resonant levels
- Window materials of Teflon-coated aluminum with PFA base are standard
- Multiplexed transducers
- Fast upgradability of existing processes (Quick Dumprinsers)
- Integrated control system
- For ambient operation to 50 C
- Single- and dual-cassette sizes available up to 300mm
