• Modeling acoustic agitation for enhanced development of PMMA resists

• Enhanced Transport by Acoustic Streaming in Deep Trench-like Cavities

• Pressure Waves Induced by Megasonics Agitation in a LIGA Development Tank

• Megasonics Surface Cleaning-Part 1

• Megasonics Surface Cleaning-Part 2

• Megasonics Surface Cleaning-Part 3

• Megasonics Surface Cleaning-Part 4

• Megasonics Surface Cleaning-Part 5
   

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